Sputter deposition
Science and technology of ferroelectric films and heterostructures for non-volatile ferroelectric memories." Materials Science and Engineering: R: Reports 32 (2001) 191–236.
, , and . "Processing technologies for ferroelectric thin films and heterostructures." Annual Review of Materials Science 28 (1998) 501–531.
, , and . "La0.5Sr0.5CoO3 electrode technology for Pb(Zr,Ti)O3 thin film nonvolatile memories." Microelectronic Engineering 29 (1995) 223–230.
, , , , , , , and . "Review of orientation-microstructure-property relationships for PZT/metal or metal-oxide layered heterostructures." Materials Research Society Symposium - Proceedings. Vol. 341. Materials Research Society, Pittsburgh, PA, United States, 1994. 341–353.
, , , , , , , and . "Layered Cu-based electrode for high-dielectric constant oxide thin film-based devices." Applied Physics Letters 82 (2003) 1452–1454.
, , , , , and . "Drifting potential humps in ionization zones: The “propeller blades” of high power impulse magnetron sputtering." Applied Physics Letters 103.14 (2013) 144103.
, , , , and . "Structure and Electronic Properties of Electrochromic NiO Films." Journal of The Electrochemical Society 140.4 (1992) 1097–1104.
, and . "Ion Implantation of Sputtered Y-Ba-Cu-O Films." Journal of Applied Physics 66 (1989) 3940–3942.
, , , and . "