@article{26706,
  keywords = {Sputtering, Sputter deposition, Ionization, Plasma ionization, Electric fields},
  author = {André Anders and Matjaž Panjan and Robert Franz and Joakim Andersson and Pavel A Ni},
  title = {Drifting potential humps in ionization zones: The “propeller blades” of high power impulse magnetron sputtering},
  abstract = {<p>Ion energy distribution functions measured for high power impulse magnetron sputtering show features, such as a broad peak at several 10&thinsp;eV with an extended tail, as well as asymmetry with respect to <em>E</em> × <em>B</em>, where <em>E</em> and <em>B</em> are the local electric and magnetic field vectors, respectively. Here it is proposed that those features are due to the formation of a potential hump of several 10&thinsp;V in each of the traveling ionization zones. Potential hump formation is associated with a negative-positive-negative space charge that naturally forms in ionization zones driven by energetic drifting electrons.</p>},
  year = {2013},
  journal = {Applied Physics Letters},
  volume = {103},
  pages = {144103},
  month = {10/2013},
  issn = {00036951},
  doi = {10.1063/1.4823827},
}