R.P.H Chang
Publications
Viewing 3 of 3 publications
2003
Materials science and integration bases for fabrication of (Ba xSr1-x)TiO3 thin film capacitors with layered Cu-based electrodes." Journal of Applied Physics 94 (2003) 6192–6200.
, , , , , , , and . "Layered Cu-based electrode for high-dielectric constant oxide thin film-based devices." Applied Physics Letters 82 (2003) 1452–1454.
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Studies of metallic species and oxygen incorporation during sputter-deposition of SrBi2Ta2O9 films, using mass spectroscopy of recoiled ions." Applied Physics Letters 72 (1998) 2529–2531.
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