%0 Journal Article
%A J Im
%A A.R Krauss
%A A.M Dhote
%A D.M Gruen
%A O Auciello
%A Ramamoorthy Ramesh
%A R.P.H Chang
%B Applied Physics Letters
%D 1998
%G eng
%P 2529-2531
%R 10.1063/1.121409
%T Studies of metallic species and oxygen incorporation during sputter-deposition of SrBi2Ta2O9 films, using mass spectroscopy of recoiled ions
%V 72