%0 Journal Article
%K Oxidation
%K Thin films
%K Copper
%K Diffusion
%K Annealing
%K Electrodes
%K Materials science
%K Permittivity
%K Capacitors
%K Synthesis (chemical)
%K Barium compounds
%K Leakage currents
%K Dielectric losses
%K Diffusion barrier
%A W Fan
%A B Kabius
%A J.M Miller
%A S Saha
%A J.A Carlisle
%A O Auciello
%A R.P.H Chang
%A Ramamoorthy Ramesh
%B Journal of Applied Physics
%D 2003
%G eng
%P 6192-6200
%R 10.1063/1.1616984
%T Materials science and integration bases for fabrication of (Ba xSr1-x)TiO3 thin film capacitors with layered Cu-based electrodes
%V 94