%0 Journal Article
%K Thin films
%K Copper
%K Ion implantation
%K Sputter deposition
%K Thin film deposition
%A Michael D Rubin
%A Ian G Brown
%A E Yin
%A David A Wruck
%B Journal of Applied Physics
%D 1989
%G eng
%P 3940-3942
%R 10.1063/1.344023
%T Ion Implantation of Sputtered Y-Ba-Cu-O Films
%V 66
%1 <p>Windows and Daylighting Group</p>
%2 LBL-26858
%8 10/1989