%0 Journal Article
%K Microstructure
%K Thin films
%K Sputter deposition
%K Laser ablation
%K Ferroelectric materials
%K Random access storage
%K Strontium compounds
%K Heterojunctions
%K Lead compounds
%K Non-volatile storage
%K Capacitors
%K Lead zirconate titanate (PZT)
%K Metallorganic vapor phase epitaxy
%K Strontium bismuth tantalate
%K Dielectric films
%A O Auciello
%A C.M Foster
%A Ramamoorthy Ramesh
%B Annual Review of Materials Science
%D 1998
%G eng
%I Annual Reviews Inc.
%P 501-531
%R 10.1146/annurev.matsci.28.1.501
%T Processing technologies for ferroelectric thin films and heterostructures
%V 28