%0 Journal Article
%K Microstructure
%K Sputter deposition
%K Laser ablation
%K Electrodes
%K Polarization
%K Ferroelectricity
%K Heterojunctions
%K Silicon wafers
%K Ferroelectric thin films
%K Non-volatile storage
%K Capacitors
%K Metallorganic chemical vapor deposition
%K Non-volatile ferroelectric memories
%A Ramamoorthy Ramesh
%A S Aggarwal
%A O Auciello
%B Materials Science and Engineering: R: Reports
%D 2001
%G eng
%P 191-236
%R 10.1016/S0927-796X(00)00032-2
%T Science and technology of ferroelectric films and heterostructures for non-volatile ferroelectric memories
%V 32