Sol-gel process

Liu, B.T, K Maki, Y So, V Nagarajan, Ramamoorthy Ramesh, J Lettieri, J.H Haeni, D.G Schlom, W Tian, X.Q Pan, F.J Walker, and R.A McKee. "Epitaxial La-doped SrTiO3 on silicon: A conductive template for epitaxial ferroelectrics on silicon." Applied Physics Letters 80 (2002) 4801–4803.

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Liu, B.T, K Maki, S Aggarwal, B Nagaraj, V Nagarajan, L Salamanca-Riba, Ramamoorthy Ramesh, A.M Dhote, and O Auciello. "Low-temperature integration of lead-based ferroelectric capacitors on Si with diffusion barrier layer." Applied Physics Letters 80 (2002) 3599–3601.

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