Dual magnetron sputtering

Mohamed, Sodky H, and André Anders. "Structural, optical and electrical properties of WOxNy films deposited by reactive dual magnetron sputtering." Surface and Coatings Technology 201.6 (2006) 2977–2983.

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Mohamed, Sodky H, and André Anders. "Physical properties of erbium implanted tungsten oxide films deposited by reactive dual magnetron sputtering." Thin Solid Films 515.13 (2007) 5264–5269.

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