%0 Journal Article
%K Optical properties
%K Dual magnetron sputtering
%K Electrical resistivity
%K Er ion implantation
%K Tungsten oxide films
%A Sodky H Mohamed
%A André Anders
%B Thin Solid Films
%D 2007
%G eng
%N 13
%P 5264-5269
%R 10.1016/j.tsf.2006.12.179
%T Physical properties of erbium implanted tungsten oxide films deposited by reactive dual magnetron sputtering
%V 515
%1 <p>Windows and Daylighting Group</p>
%2 LBNL-62248
%8 05/2007