%0 Journal Article
%K Optical properties
%K Dual magnetron sputtering
%K Electrical
%K Structural
%K Tungsten oxynitride thin films
%A Sodky H Mohamed
%A André Anders
%B Surface and Coatings Technology
%D 2006
%G eng
%N 6
%P 2977-2983
%R 10.1016/j.surfcoat.2006.06.008 
%T Structural, optical and electrical properties of WOxNy films deposited by reactive dual magnetron sputtering
%V 201
%1 <p>Windows and Daylighting Group</p>
%2 LBNL-59900