Process integration of PZT thin films with oxide electrodes for high density nonvolatile memories

Publication Type
Journal Article
Author
DOI
10.1080/10584589808238768
Notes
cited By 0
Journal
Integrated Ferroelectrics
Volume
20
Year of Publication
1998
Number
1-4
Pagination
69
Publisher
Taylor and Francis Inc.
ISSN Number
10584587
Keywords
Research Areas
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