@article{33844,
  keywords = {Thin films, Perovskite, Lanthanum compounds, Polarization, Ferroelectric materials, Non-volatile storage, Capacitors, Thermal effects, Dielectric films, Process integration},
  author = {Ramamoorthy Ramesh},
  title = {Process integration of PZT thin films with oxide electrodes for high density nonvolatile memories},
  year = {1998},
  journal = {Integrated Ferroelectrics},
  volume = {20},
  number = {1-4},
  pages = {69},
  publisher = {Taylor and Francis Inc.},
  issn = {10584587},
  doi = {10.1080/10584589808238768},
  note = {cited By 0},
  language = {eng},
}