%0 Journal Article
%K Thin films
%K Perovskite
%K Lanthanum compounds
%K Polarization
%K Ferroelectric materials
%K Non-volatile storage
%K Capacitors
%K Thermal effects
%K Dielectric films
%K Process integration
%A Ramamoorthy Ramesh
%B Integrated Ferroelectrics
%D 1998
%G eng
%I Taylor and Francis Inc.
%P 69
%R 10.1080/10584589808238768
%T Process integration of PZT thin films with oxide electrodes for high density nonvolatile memories
%V 20