TY - JOUR KW - Thin films KW - Perovskite KW - Lanthanum compounds KW - Polarization KW - Ferroelectric materials KW - Non-volatile storage KW - Capacitors KW - Thermal effects KW - Dielectric films KW - Process integration AU - Ramamoorthy Ramesh BT - Integrated Ferroelectrics DO - 10.1080/10584589808238768 LA - eng M1 - 1-4 N1 - cited By 0 PB - Taylor and Francis Inc. PY - 1998 EP - 69 T2 - Integrated Ferroelectrics TI - Process integration of PZT thin films with oxide electrodes for high density nonvolatile memories VL - 20 SN - 10584587 ER -