Oxide electrodes as barriers to hydrogen damage of Pb(Zr,Ti)O3-based ferroelectric capacitors

Publication Type
Journal Article
Authors
DOI
10.1063/1.124052
Abstract
The use of (La,Sr)CoO3 (LSCO) oxide electrodes as diffusion barriers to hydrogen is investigated during forming gas anneals (FGA). After FGA, almost no bipolar fatigue up to 1011 cycles, good logic state retention, and no imprint at 100 °C are exhibited by the ferroelectric capacitors.
Notes
cited By 59
Journal
Applied Physics Letters
Volume
74
Year of Publication
1999
Number
20
Pagination
3023-3025
Publisher
American Institute of Physics Inc., Woodbury
ISSN Number
00036951
Keywords
Research Areas
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