TY - JOUR
KW - Annealing
KW - Hydrogen
KW - Electrochemical electrodes
KW - Lanthanum compounds
KW - Polarization
KW - Ferroelectricity
KW - Strontium compounds
KW - Ferroelectric devices
KW - Lead compounds
KW - Ferroelectric capacitors
KW - Capacitors
KW - Dielectric films
KW - Forming gas anneals (FGA)
AU - S Aggarwal
AU - S.R Perusse
AU - B Nagaraj
AU - Ramamoorthy Ramesh
AB - The use of (La,Sr)CoO3 (LSCO) oxide electrodes as diffusion barriers to hydrogen is investigated during forming gas anneals (FGA). After FGA, almost no bipolar fatigue up to 1011 cycles, good logic state retention, and no imprint at 100 °C are exhibited by the ferroelectric capacitors.
BT - Applied Physics Letters
DO - 10.1063/1.124052
LA - eng
M1 - 20
N1 - cited By 59
N2 - The use of (La,Sr)CoO3 (LSCO) oxide electrodes as diffusion barriers to hydrogen is investigated during forming gas anneals (FGA). After FGA, almost no bipolar fatigue up to 1011 cycles, good logic state retention, and no imprint at 100 °C are exhibited by the ferroelectric capacitors.
PB - American Institute of Physics Inc., Woodbury
PY - 1999
SP - 3023
EP - 3025
T2 - Applied Physics Letters
TI - Oxide electrodes as barriers to hydrogen damage of Pb(Zr,Ti)O3-based ferroelectric capacitors
VL - 74
SN - 00036951
ER -