Epitaxial ferroelectric Pb(Zr,Ti)O3 thin films on Si using SrTiO3 template layers

Publication Type
Journal Article
Authors
DOI
10.1063/1.1428413
Abstract
In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr,Ti)O3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La 0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d33 coefficients compared to textured and untextured polycrystalline films. © 2002 American Institute of Physics.
Notes
cited By 126
Journal
Applied Physics Letters
Volume
80
Year of Publication
2002
Number
1
Pagination
97-99
ISSN Number
00036951
Keywords
Research Areas
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