Epitaxial ferroelectric Pb(Zr,Ti)O3 thin films on Si using SrTiO3 template layers
Publication Type | Journal Article
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Authors | |
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DOI |
10.1063/1.1428413
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Abstract |
In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr,Ti)O3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La 0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d33 coefficients compared to textured and untextured polycrystalline films. © 2002 American Institute of Physics.
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Notes |
cited By 126
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Journal |
Applied Physics Letters
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Volume |
80
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Year of Publication |
2002
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Number |
1
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Pagination |
97-99
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ISSN Number |
00036951
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Keywords |
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Research Areas | |
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