Epitaxial ferroelectric Pb(Zr,Ti)O3 thin films on Si using SrTiO3 template layers

Publication Type	Journal Article

Authors	Y Wang C Ganpule B.T Liu H Li K Mori B Hill M Wuttig Ramamoorthy Ramesh J Finder Z Yu R Droopad K Eisenbeiser
DOI	10.1063/1.1428413
Abstract	In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr,Ti)O3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La 0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d33 coefficients compared to textured and untextured polycrystalline films. © 2002 American Institute of Physics.
Notes	cited By 126
Journal	Applied Physics Letters
Volume	80
Year of Publication	2002
Number	1
Pagination	97-99
ISSN Number	00036951
Keywords	Lead Perovskite Zirconium Cobalt compounds Epitaxial growth Ferroelectricity Strontium titanates X-ray Diffraction Strontium alloys Remnant polarizations Epitaxial ferroelectric SrTiO Epitaxial films In-plane Semiconducting silicon compounds PZT Template layers Pb(Zr Ti)O Out-of-plane Polycrystalline film X-ray diffraction studies
Research Areas	Ramesh Lab
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