%0 Journal Article
%K lead
%K Perovskite
%K zirconium
%K cobalt compounds
%K Epitaxial growth
%K ferroelectricity
%K Strontium titanates
%K X ray diffraction
%K Strontium alloys
%K Remnant polarizations
%K Epitaxial ferroelectric
%K SrTiO
%K Epitaxial films
%K In-plane
%K Semiconducting silicon compounds
%K PZT
%K Template layers
%K Pb(Zr
%K Ti)O
%K Out-of-plane
%K Polycrystalline film
%K X-ray diffraction studies
%A Y Wang
%A C Ganpule
%A B.T Liu
%A H Li
%A K Mori
%A B Hill
%A M Wuttig
%A Ramamoorthy Ramesh
%A J Finder
%A Z Yu
%A R Droopad
%A K Eisenbeiser
%B Applied Physics Letters
%D 2002
%G eng
%P 97-99
%R 10.1063/1.1428413
%T Epitaxial ferroelectric Pb(Zr,Ti)O3 thin films on Si using SrTiO3 template layers
%V 80
%X In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr,Ti)O3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La 0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d33 coefficients compared to textured and untextured polycrystalline films. © 2002 American Institute of Physics.