@article{33717, keywords = {Lead, Perovskite, Zirconium, Cobalt compounds, Epitaxial growth, Ferroelectricity, Strontium titanates, X-ray Diffraction, Strontium alloys, Remnant polarizations, Epitaxial ferroelectric, SrTiO, Epitaxial films, In-plane, Semiconducting silicon compounds, PZT, Template layers, Pb(Zr, Ti)O, Out-of-plane, Polycrystalline film, X-ray diffraction studies}, author = {Y Wang and C Ganpule and B.T Liu and H Li and K Mori and B Hill and M Wuttig and Ramamoorthy Ramesh and J Finder and Z Yu and R Droopad and K Eisenbeiser}, title = {Epitaxial ferroelectric Pb(Zr,Ti)O3 thin films on Si using SrTiO3 template layers}, abstract = {In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr,Ti)O3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La 0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d33 coefficients compared to textured and untextured polycrystalline films. © 2002 American Institute of Physics.}, year = {2002}, journal = {Applied Physics Letters}, volume = {80}, number = {1}, pages = {97-99}, issn = {00036951}, doi = {10.1063/1.1428413}, note = {cited By 126}, language = {eng}, }