TY - JOUR
KW - Lead
KW - Perovskite
KW - Zirconium
KW - Cobalt compounds
KW - Epitaxial growth
KW - Ferroelectricity
KW - Strontium titanates
KW - X-ray Diffraction
KW - Strontium alloys
KW - Remnant polarizations
KW - Epitaxial ferroelectric
KW - SrTiO
KW - Epitaxial films
KW - In-plane
KW - Semiconducting silicon compounds
KW - PZT
KW - Template layers
KW - Pb(Zr
KW - Ti)O
KW - Out-of-plane
KW - Polycrystalline film
KW - X-ray diffraction studies
AU - Y Wang
AU - C Ganpule
AU - B.T Liu
AU - H Li
AU - K Mori
AU - B Hill
AU - M Wuttig
AU - Ramamoorthy Ramesh
AU - J Finder
AU - Z Yu
AU - R Droopad
AU - K Eisenbeiser
AB - In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr,Ti)O3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La 0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d33 coefficients compared to textured and untextured polycrystalline films. © 2002 American Institute of Physics.
BT - Applied Physics Letters
DO - 10.1063/1.1428413
LA - eng
M1 - 1
N1 - cited By 126
N2 - In this letter, we report on the integration of epitaxial ferroelectric Pb(Zr,Ti)O3 (PZT) thin films on Si [100] substrates using a SrTiO3 (STO) template layer and a conducting perovskite (La 0.5Sr0.5)CoO3 electrode. X-ray diffraction studies reveal both in-plane and out-of-plane alignment of the heterostructure. The epitaxial films show extremely high remnant polarization as well as piezoelectric d33 coefficients compared to textured and untextured polycrystalline films. © 2002 American Institute of Physics.
PY - 2002
SP - 97
EP - 99
T2 - Applied Physics Letters
TI - Epitaxial ferroelectric Pb(Zr,Ti)O3 thin films on Si using SrTiO3 template layers
VL - 80
SN - 00036951
ER -