(Ba,Sr)TiO3 thin films with conducting perovskite electrodes for dynamic random access memory applications
| Publication Type | Journal Article
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| Authors | |
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| DOI |
10.1063/1.124104
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| Abstract |
The leakage current mechanism of (Ba,Sr)TiO3 capacitors were examined for dynamic random access memory applications. Leakage currents were measured in the temperature range 20-150 °C, and the data was analyzed for the various mechanisms. The extracted dielectric constant, corresponding to Poole-Frenkel mechanism, is in good agreement with the experimental value of the optical dielectric constant.
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| Notes |
cited By 64
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| Journal |
Applied Physics Letters
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| Volume |
74
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| Year of Publication |
1999
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| Number |
21
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| Pagination |
3194-3196
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| Publisher |
American Institute of Physics Inc., Woodbury
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| ISSN Number |
00036951
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