%0 Journal Article %K Thin films %K Electric potential %K Perovskite %K Electrodes %K Current density %K Permittivity %K Strontium compounds %K Strontium titanate %K Capacitance %K Capacitors %K Leakage currents %K Barium titanate %K Dynamic random access storage %K Dielectric films %K Poole-Frenkel mechanisms %A B Nagaraj %A T Sawhney %A S Perusse %A S Aggarwal %A Ramamoorthy Ramesh %A V.S Kaushik %A S Zafar %A R.E Jones %A J.-H Lee %A V Balu %A J Lee %B Applied Physics Letters %D 1999 %G eng %I American Institute of Physics Inc., Woodbury %P 3194-3196 %R 10.1063/1.124104 %T (Ba,Sr)TiO3 thin films with conducting perovskite electrodes for dynamic random access memory applications %V 74 %X The leakage current mechanism of (Ba,Sr)TiO3 capacitors were examined for dynamic random access memory applications. Leakage currents were measured in the temperature range 20-150 °C, and the data was analyzed for the various mechanisms. The extracted dielectric constant, corresponding to Poole-Frenkel mechanism, is in good agreement with the experimental value of the optical dielectric constant.