TY - JOUR KW - Thin films KW - Electric potential KW - Perovskite KW - Electrodes KW - Current density KW - Permittivity KW - Strontium compounds KW - Strontium titanate KW - Capacitance KW - Capacitors KW - Leakage currents KW - Barium titanate KW - Dynamic random access storage KW - Dielectric films KW - Poole-Frenkel mechanisms AU - B Nagaraj AU - T Sawhney AU - S Perusse AU - S Aggarwal AU - Ramamoorthy Ramesh AU - V.S Kaushik AU - S Zafar AU - R.E Jones AU - J.-H Lee AU - V Balu AU - J Lee AB - The leakage current mechanism of (Ba,Sr)TiO3 capacitors were examined for dynamic random access memory applications. Leakage currents were measured in the temperature range 20-150 °C, and the data was analyzed for the various mechanisms. The extracted dielectric constant, corresponding to Poole-Frenkel mechanism, is in good agreement with the experimental value of the optical dielectric constant. BT - Applied Physics Letters DO - 10.1063/1.124104 LA - eng M1 - 21 N1 - cited By 64 N2 - The leakage current mechanism of (Ba,Sr)TiO3 capacitors were examined for dynamic random access memory applications. Leakage currents were measured in the temperature range 20-150 °C, and the data was analyzed for the various mechanisms. The extracted dielectric constant, corresponding to Poole-Frenkel mechanism, is in good agreement with the experimental value of the optical dielectric constant. PB - American Institute of Physics Inc., Woodbury PY - 1999 SP - 3194 EP - 3196 T2 - Applied Physics Letters TI - (Ba,Sr)TiO3 thin films with conducting perovskite electrodes for dynamic random access memory applications VL - 74 SN - 00036951 ER -