Microfluidics

Baek, S.H, J Park, D.M Kim, V.A Aksyuk, R.R Das, S.D Bu, D.A Felker, J Lettieri, V Vaithyanathan, S.S.N Bharadwaja, N Bassiri-Gharb, Y.B Chen, H.P Sun, C.M Folkman, H.W Jang, D.J Kreft, S.K Streiffer, Ramamoorthy Ramesh, X.Q Pan, S Trolier-McKinstry, D.G Schlom, M.S Rzchowski, R.H Blick, and C.B Eom. "Giant piezoelectricity on Si for hyperactive MEMS." Science 334 (2011) 958–961.