TY - JOUR
KW - Lead
KW - Film
KW - Crystal
KW - Silicon
KW - Imaging
KW - Crystal structure
KW - Titanium dioxide
KW - Article
KW - Priority journal
KW - Piezoelectricity
KW - Microelectromechanical system
KW - Imaging method
KW - Ultrasonics
KW - Echography
KW - Energy expenditure
KW - Mechanotransduction
KW - Microfluidics
AU - S.H Baek
AU - J Park
AU - D.M Kim
AU - V.A Aksyuk
AU - R.R Das
AU - S.D Bu
AU - D.A Felker
AU - J Lettieri
AU - V Vaithyanathan
AU - S.S.N Bharadwaja
AU - N Bassiri-Gharb
AU - Y.B Chen
AU - H.P Sun
AU - C.M Folkman
AU - H.W Jang
AU - D.J Kreft
AU - S.K Streiffer
AU - Ramamoorthy Ramesh
AU - X.Q Pan
AU - S Trolier-McKinstry
AU - D.G Schlom
AU - M.S Rzchowski
AU - R.H Blick
AU - C.B Eom
AB - {Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg 1/3Nb2/3)O3-PbTiO3 (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO3 template layer with superior piezoelectric coefficients (e31
BT - Science
DO - 10.1126/science.1207186
LA - eng
M1 - 6058
N1 - cited By 262
N2 - {Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg 1/3Nb2/3)O3-PbTiO3 (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO3 template layer with superior piezoelectric coefficients (e31
PB - American Association for the Advancement of Science
PY - 2011
SP - 958
EP - 961
T2 - Science
TI - Giant piezoelectricity on Si for hyperactive MEMS
VL - 334
SN - 00368075
ER -