Giant piezoelectricity on Si for hyperactive MEMS
Publication Type | Journal Article
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Authors | |
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DOI |
10.1126/science.1207186
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Abstract |
{Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg 1/3Nb2/3)O3-PbTiO3 (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO3 template layer with superior piezoelectric coefficients (e31
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Notes |
cited By 262
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Journal |
Science
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Volume |
334
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Year of Publication |
2011
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Number |
6058
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Pagination |
958-961
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Publisher |
American Association for the Advancement of Science
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ISSN Number |
00368075
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Keywords | |
Research Areas | |
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