Giant piezoelectricity on Si for hyperactive MEMS

Publication Type
Journal Article
Authors
DOI
10.1126/science.1207186
Abstract
{Microelectromechanical systems (MEMS) incorporating active piezoelectric layers offer integrated actuation, sensing, and transduction. The broad implementation of such active MEMS has long been constrained by the inability to integrate materials with giant piezoelectric response, such as Pb(Mg 1/3Nb2/3)O3-PbTiO3 (PMN-PT). We synthesized high-quality PMN-PT epitaxial thin films on vicinal (001) Si wafers with the use of an epitaxial (001) SrTiO3 template layer with superior piezoelectric coefficients (e31
Notes
cited By 262
Journal
Science
Volume
334
Year of Publication
2011
Number
6058
Pagination
958-961
Publisher
American Association for the Advancement of Science
ISSN Number
00368075
Keywords
Research Areas
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