%0 Journal Article
%K Lead
%K Film
%K Crystal
%K Silicon
%K Imaging
%K Crystal structure
%K Titanium dioxide
%K Article
%K Priority journal
%K Piezoelectricity
%K Microelectromechanical system
%K Imaging method
%K Ultrasonics
%K Echography
%K Energy expenditure
%K Mechanotransduction
%K Microfluidics
%A S.H Baek
%A J Park
%A D.M Kim
%A V.A Aksyuk
%A R.R Das
%A S.D Bu
%A D.A Felker
%A J Lettieri
%A V Vaithyanathan
%A S.S.N Bharadwaja
%A N Bassiri-Gharb
%A Y.B Chen
%A H.P Sun
%A C.M Folkman
%A H.W Jang
%A D.J Kreft
%A S.K Streiffer
%A Ramamoorthy Ramesh
%A X.Q Pan
%A S Trolier-McKinstry
%A D.G Schlom
%A M.S Rzchowski
%A R.H Blick
%A C.B Eom
%B Science
%D 2011
%G eng
%I American Association for the Advancement of Science
%P 958-961
%R 10.1126/science.1207186
%T Giant piezoelectricity on Si for hyperactive MEMS
%V 334