A Plasma Lens for Magnetron Sputtering

Date Published	11/2011
Publication Type	Journal Article

Authors	André Anders Jeff Brown
DOI	10.1109/TPS.2011.2157172
Abstract	A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.
Journal	IEEE Transactions on Plasma Science
Volume	39
Year of Publication	2011
Issue	11
Pagination	2528 - 2529
ISSN Number	0093-3813
Short Title	IEEE Trans. Plasma Sci.
Organizations	Building Technologies Department Building & Industrial Energy Systems Division Windows and Envelope Materials
Research Areas	Advanced Coatings Building Façade Solutions Windows and Daylighting W and D: Dynamic Glazings and Advanced Coatings BTUS Windows and Daylighting
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