%0 Journal Article
%A André Anders
%A Jeff Brown
%B IEEE Transactions on Plasma Science
%D 2011
%N 11
%P 2528 - 2529
%R 10.1109/TPS.2011.2157172
%T A Plasma Lens for Magnetron Sputtering
%V 39
%8 11/2011
%! IEEE Trans. Plasma Sci.
%X <p>A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.</p>