@article{26703,
  author = {André Anders and Jeff Brown},
  title = {A Plasma Lens for Magnetron Sputtering},
  abstract = {<p>A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.</p>},
  year = {2011},
  journal = {IEEE Transactions on Plasma Science},
  volume = {39},
  pages = {2528 - 2529},
  month = {11/2011},
  issn = {0093-3813},
  doi = {10.1109/TPS.2011.2157172},
}