A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.
BT - IEEE Transactions on Plasma Science DA - 11/2011 DO - 10.1109/TPS.2011.2157172 IS - 11 N2 -A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.
PY - 2011 SP - 2528 EP - 2529 ST - IEEE Trans. Plasma Sci. T2 - IEEE Transactions on Plasma Science TI - A Plasma Lens for Magnetron Sputtering VL - 39 SN - 0093-3813 ER -