Laser wavelength effects in ultrafast near-field laser nanostructuring of Si

Date Published	07/2009
Publication Type	Journal Article

Authors	Vassilia Zorba Xianglei Mao Richard E Russo
DOI	10.1063/1.3193537
Journal	Applied Physics Letter
Volume	95
Year of Publication	2009
Issue	4
Pagination	041110-1-041110-3
ISSN Number	1077-3118
Short Title	Appl. Phys. Lett.
Keywords	Silicon High-speed optical techniques Nanostructured materials Elemental semiconductors Laser materials processing Machining Nanofabrication Semiconductor growth
Organizations	Laser Technologies Group Energy Technologies & Systems Division
Research Areas	No Research Area
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