TY - JOUR
KW - Silicon
KW - High-speed optical techniques
KW - Nanostructured materials
KW - Elemental semiconductors
KW - Laser materials processing
KW - Machining
KW - Nanofabrication
KW - Semiconductor growth
AU - Vassilia Zorba
AU - Xianglei Mao
AU - Richard E Russo
BT - Applied Physics Letter
DA - 07/2009
DO - 10.1063/1.3193537
IS - 4
LA - eng
PY - 2009
SP - 041110
EP - 3
ST - Appl. Phys. Lett.
T2 - Applied Physics Letter
TI - Laser wavelength effects in ultrafast near-field laser nanostructuring of Si
VL - 95
SN - 1077-3118 
ER -