@article{25368,
  keywords = {Silicon, High-speed optical techniques, Nanostructured materials, Elemental semiconductors, Laser materials processing, Machining, Nanofabrication, Semiconductor growth},
  author = {Vassilia Zorba and Xianglei Mao and Richard E Russo},
  title = {Laser wavelength effects in ultrafast near-field laser nanostructuring of Si},
  year = {2009},
  journal = {Applied Physics Letter},
  volume = {95},
  pages = {041110-1-041110-3},
  month = {07/2009},
  issn = {1077-3118 },
  doi = {10.1063/1.3193537},
  language = {eng},
}