%0 Journal Article
%K Silicon
%K High-speed optical techniques
%K Nanostructured materials
%K Elemental semiconductors
%K Laser materials processing
%K Machining
%K Nanofabrication
%K Semiconductor growth
%A Vassilia Zorba
%A Xianglei Mao
%A Richard E Russo
%B Applied Physics Letter
%D 2009
%G eng
%N 4
%P 041110-1-041110-3
%R 10.1063/1.3193537
%T Laser wavelength effects in ultrafast near-field laser nanostructuring of Si
%V 95
%8 07/2009
%! Appl. Phys. Lett.