Controlling crystallization of Pb(Zr,Ti)O3 thin films on IrO2 electrodes at low temperature through interface engineering
| Publication Type | Journal Article
|
|---|
| Authors | |
|---|---|
| DOI |
10.1063/1.1544057
|
| Abstract |
Controlling crystallization of Pb(Zr,Ti)O3 thin films on IrO2 electrodes at low temperature through interface engineering was analyzed. It was found that well-behaved PZT films on SRO/IrO2-Si could be fully crystallized at 450°C using a modified sol-gel solution. The crystallization temperature was lower than that of PZT films on IrO2-Si.
|
| Notes |
cited By 36
|
| Journal |
Applied Physics Letters
|
| Volume |
82
|
| Year of Publication |
2003
|
| Number |
8
|
| Pagination |
1263-1265
|
| ISSN Number |
00036951
|
| Keywords | |
| Research Areas | |
| Download citation |