@article{33697, keywords = {Nucleation, Microstructure, Electrodes, Film growth, Crystallization, Ferroelectric thin films, Capacitors, Sol-gels, Saturation voltage}, author = {K Maki and B.T Liu and H Vu and V Nagarajan and Ramamoorthy Ramesh and Y Fujimori and T Nakamura and H Takasu}, title = {Controlling crystallization of Pb(Zr,Ti)O3 thin films on IrO2 electrodes at low temperature through interface engineering}, abstract = {Controlling crystallization of Pb(Zr,Ti)O3 thin films on IrO2 electrodes at low temperature through interface engineering was analyzed. It was found that well-behaved PZT films on SRO/IrO2-Si could be fully crystallized at 450°C using a modified sol-gel solution. The crystallization temperature was lower than that of PZT films on IrO2-Si.}, year = {2003}, journal = {Applied Physics Letters}, volume = {82}, number = {8}, pages = {1263-1265}, issn = {00036951}, doi = {10.1063/1.1544057}, note = {cited By 36}, language = {eng}, }