Measurement of internal stresses via the polarization in epitaxial ferroelectric films

A study was carried out with the aim of formulating an approach to determine internal stresses in the constrained ferroelectric (FE) films using its electrical and electromechanical characteristics. As a first step, an attempt was made to clarify the theoretical background for electromechanical properties of constrained FE films. Following this, available experimental work was analyzed from this point of view. Overall, it was confirmed that the mechanical characteristics of the films can be determined through the electric response of constrained films.