TY - JOUR
KW - Thin films
KW - Electrodes
KW - Substrates
KW - Internal stresses
KW - Elasticity
KW - Polarization
KW - Epitaxial growth
KW - Permittivity
KW - Dielectric susceptibility
KW - Ferroelectric devices
KW - Ferroelectric films
KW - Differential equations
KW - Free energy
KW - Elastic strain tensor
AU - A.L Roytburd
AU - S.P Alpay
AU - V Nagarajan
AU - C.S Ganpule
AU - S Aggarwal
AU - E.D Williams
AU - Ramamoorthy Ramesh
AB - A study was carried out with the aim of formulating an approach to determine internal stresses in the constrained ferroelectric (FE) films using its electrical and electromechanical characteristics. As a first step, an attempt was made to clarify the theoretical background for electromechanical properties of constrained FE films. Following this, available experimental work was analyzed from this point of view. Overall, it was confirmed that the mechanical characteristics of the films can be determined through the electric response of constrained films.
BT - Physical Review Letters
DO - 10.1103/PhysRevLett.85.190
LA - eng
M1 - 1
N1 - cited By 118
N2 - A study was carried out with the aim of formulating an approach to determine internal stresses in the constrained ferroelectric (FE) films using its electrical and electromechanical characteristics. As a first step, an attempt was made to clarify the theoretical background for electromechanical properties of constrained FE films. Following this, available experimental work was analyzed from this point of view. Overall, it was confirmed that the mechanical characteristics of the films can be determined through the electric response of constrained films.
PB - American Inst of Physics, Woodbury, NY, United States
PY - 2000
SP - 190
EP - 193
T2 - Physical Review Letters
TI - Measurement of internal stresses via the polarization in epitaxial ferroelectric films
VL - 85
SN - 00319007
ER -