A Plasma Lens for Magnetron Sputtering
| Date Published |
11/2011
|
|---|---|
| Publication Type | Journal Article
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| Authors | |
|---|---|
| DOI |
10.1109/TPS.2011.2157172
|
| Abstract |
A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate. |
| Journal |
IEEE Transactions on Plasma Science
|
| Volume |
39
|
| Year of Publication |
2011
|
| Issue |
11
|
| Pagination |
2528 - 2529
|
| ISSN Number |
0093-3813
|
| Short Title |
IEEE Trans. Plasma Sci.
|
| Organizations | |
| Research Areas | |
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