Simultaneous measurement of the piezoelectric and dielectric response of nanoscale ferroelectric capacitors by an atomic force microscopy based approach

Publication Type
Journal Article
Authors
DOI
10.1007/s00339-006-3592-2
Abstract
We present a sensitive method to simultaneously acquire the C(V) characteristics and piezoresponse of submicron size ferroelectric capacitors using an Atomic Force Microscope (AFM). Model Pt/(La0.5,Sr 0.5)CoO3/ PbZr0.4Ti0.6 O 3/(La0.5,Sr0.5)CoO3/La:SrTiO 3/Si nanocapacitors were fabricated by focused ion beam milling from 100 μm2 down to 0.04 μm2. With this AFM based capacitance measurement technique we show clear "double-humped" C(V) for all sizes with no significant change in the peak value of the εr down to capacitors with the smallest area of 0.04 μm 2. The smallest capacitance measured is only of the order a few femtofarads, demonstrating the high sensitivity of the technique. Simultaneously, the piezoelectric response is recorded for each measurement, thus the technique facilitates simultaneous piezoresponse and dielectric characterization of ferroelectric memory devices.
Notes
cited By 8
Journal
Applied Physics A: Materials Science and Processing
Volume
84
Year of Publication
2006
Number
1-2
Pagination
67-71
ISSN Number
09478396
Keywords
Research Areas
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