Skip to main content

User account menu

  • Log in
Home

Main navigation

  • Home
  • Keywords
  • Authors

MEMS

Liu, K, C Cheng, Z Cheng, K Wang, Ramamoorthy Ramesh, and J Wu. "Giant-amplitude, high-work density microactuators with phase transition activated nanolayer bimorphs." Nano Letters 12 (2012) 6302–6308.

Google Scholar  |  DOI  |  BibTeX  |  Endnote tagged  |  RIS

View
Miller, L.M, C.C Ho, P.C Shafer, P.K Wright, J.W Evans, and Ramamoorthy Ramesh. "Integration of a low frequency, tunable MEMS piezoelectric energy harvester and a thick film micro capacitor as a power supply system for wireless sensor nodes." 2009 IEEE Energy Conversion Congress and Exposition, ECCE 2009. 2009. 2627–2634.

View
Ouyang, J, Ramamoorthy Ramesh, and A.L Roytburd. "Effective direct piezoelectric constants in epitaxial ferroelectric films as MEMS sensors." Proceedings of the Materials Research Society Symposium. Vol. 881. 2005. 125–130.

View
©2026 Energy Technologies Area, Berkeley Lab

Our organization

  • Contact
  • Energy Technologies Area
  • Lawrence Berkeley National Laboratory
  • Privacy and Security Notice