TY - JOUR
KW - Electricity
KW - Oxide
KW - Oxides
KW - Microanalysis
KW - Light
KW - Chemistry
KW - Microfabrication
KW - Phase transitions
KW - Heat
KW - Vanadium
KW - Transducers
KW - Article
KW - Structural phase transition
KW - Phase transition
KW - Equipment design
KW - Actuation mechanism
KW - Aqueous condition
KW - Artificial muscle
KW - Bimorph
KW - High amplitudes
KW - High durability
KW - Integrated designs
KW - Length scale
KW - Manufacturability
KW - Mechanical motions
KW - Micro-scales
KW - Microfabrication process
KW - Nanolayers
KW - Potential applications
KW - Three dimensional geometry
KW - Vanadium dioxide
KW - Work output
KW - Working environment
KW - Actuators
KW - Drug delivery
KW - Electromechanical devices
KW - MEMS
KW - Microactuators
KW - Vanadium derivative
KW - Equipment
KW - Microelectromechanical system
KW - Microtechnology
KW - Transducer
KW - Hot Temperature
KW - Micro-Electrical-Mechanical Systems
KW - Vanadium compounds
AU - K Liu
AU - C Cheng
AU - Z Cheng
AU - K Wang
AU - Ramamoorthy Ramesh
AU - J Wu
AB - Various mechanisms are currently exploited to transduce a wide range of stimulating sources into mechanical motion. At the microscale, simultaneously high amplitude, high work output, and high speed in actuation are hindered by limitations of these actuation mechanisms. Here we demonstrate a set of microactuators fabricated by a simple microfabrication process, showing simultaneously high performance by these metrics, operated on the structural phase transition in vanadium dioxide responding to diverse stimuli of heat, electric current, and light. In both ambient and aqueous conditions, the actuators bend with exceedingly high displacement-to-length ratios up to 1 in the sub-100 μm length scale, work densities over 0.63 J/cm3, and at frequencies up to 6 kHz. The functionalities of actuation can be further enriched with integrated designs of planar as well as three-dimensional geometries. Combining the superior performance, high durability, diversity in responsive stimuli, versatile working environments, and microscale manufacturability, these actuators offer potential applications in microelectromechanical systems, microfluidics, robotics, drug delivery, and artificial muscles. © 2012 American Chemical Society.
BT - Nano Letters
DO - 10.1021/nl303405g
LA - eng
M1 - 12
N1 - cited By 90
N2 - Various mechanisms are currently exploited to transduce a wide range of stimulating sources into mechanical motion. At the microscale, simultaneously high amplitude, high work output, and high speed in actuation are hindered by limitations of these actuation mechanisms. Here we demonstrate a set of microactuators fabricated by a simple microfabrication process, showing simultaneously high performance by these metrics, operated on the structural phase transition in vanadium dioxide responding to diverse stimuli of heat, electric current, and light. In both ambient and aqueous conditions, the actuators bend with exceedingly high displacement-to-length ratios up to 1 in the sub-100 μm length scale, work densities over 0.63 J/cm3, and at frequencies up to 6 kHz. The functionalities of actuation can be further enriched with integrated designs of planar as well as three-dimensional geometries. Combining the superior performance, high durability, diversity in responsive stimuli, versatile working environments, and microscale manufacturability, these actuators offer potential applications in microelectromechanical systems, microfluidics, robotics, drug delivery, and artificial muscles. © 2012 American Chemical Society.
PY - 2012
SP - 6302
EP - 6308
T2 - Nano Letters
TI - Giant-amplitude, high-work density microactuators with phase transition activated nanolayer bimorphs
VL - 12
SN - 15306984
ER -