%0 Journal Article
%K Electricity
%K Oxide
%K Oxides
%K Microanalysis
%K Light
%K Chemistry
%K Microfabrication
%K Phase transitions
%K Heat
%K Vanadium
%K Transducers
%K Article
%K Structural phase transition
%K Phase transition
%K Equipment design
%K Actuation mechanism
%K Aqueous condition
%K Artificial muscle
%K Bimorph
%K High amplitudes
%K High durability
%K Integrated designs
%K Length scale
%K Manufacturability
%K Mechanical motions
%K Micro-scales
%K Microfabrication process
%K Nanolayers
%K Potential applications
%K Three dimensional geometry
%K Vanadium dioxide
%K Work output
%K Working environment
%K Actuators
%K Drug delivery
%K Electromechanical devices
%K MEMS
%K Microactuators
%K Vanadium derivative
%K Equipment
%K Microelectromechanical system
%K Microtechnology
%K Transducer
%K Hot Temperature
%K Micro-Electrical-Mechanical Systems
%K Vanadium compounds
%A K Liu
%A C Cheng
%A Z Cheng
%A K Wang
%A Ramamoorthy Ramesh
%A J Wu
%B Nano Letters
%D 2012
%G eng
%P 6302-6308
%R 10.1021/nl303405g
%T Giant-amplitude, high-work density microactuators with phase transition activated nanolayer bimorphs
%V 12