Growth of (001) oriented La-Sr-Co-O/Pb-La-Zr-Ti-O/La-Sr-Co-O ferroelectric capacitors on (001) GaAs with a MgO buffer layer
Publication Type | Journal Article
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Authors | |
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DOI |
10.1080/10584589608225749
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Abstract |
Thin film La0.5Sr0.5CoO3Pb0.9La 0.1Zr0.2Ti0.3O3/La 0.5Sr0.5CoO3 capacitor structures (LSCO/PLZT/LSCO) have been grown on (001) GaAs substrates with MgO as a buffer layer. The MgO films on GaAs were grown by pulsed laser deposition and electron-beam evaporation and the capacitor heterostructures were grown using pulsed laser deposition. X-ray diffraction (XRD) showed all films to be (001) oriented. Ferroelectric capacitors were fabricated to determine their electrical behavior: the films showed resistivity above 1010 ohms/cm2, a typical saturation polarization of 20-30 μC/cm2, minimum retention loss, low time-dependent imprint and negligible fatigue up to 1011 cycles. These characteristics indicate that high-quality (001) oriented PLZT can be easily integrated with GaAs substrates, and could be used to produce GaAs-based electrical and, more importantly, optical devices.
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Notes |
cited By 0
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Journal |
Integrated Ferroelectrics
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Volume |
12
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Year of Publication |
1996
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Number |
1
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Pagination |
63-69
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Publisher |
Taylor and Francis Inc.
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ISSN Number |
10584587
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Keywords | |
Research Areas | |
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