Analysis of thin PZT films as a function of depth and thickness by GIXS
| Publication Type | Journal Article
|
|---|
| Authors | |
|---|---|
| DOI |
10.1080/10584580008216680
|
| Abstract |
We have performed depth profile studies on PZT films of different thickness. Thin epitaxial films of PbZr0.2Ti0.8O3 have been deposited on mono-crystalline (001) LaAlO3 substrate by pulsed laser deposition. Grazing incidence X-ray scattering was used to study the films' structure. GIXS technique was used to analyze the in-plane compression of lattice parameters as a function of depth within the films. © 2000 OPA (Overseas Publishers Association) N.V. Published by license under the Gordon and Breach Science Publishers imprint.
|
| Notes |
cited By 2
|
| Journal |
Integrated Ferroelectrics
|
| Volume |
29
|
| Year of Publication |
2000
|
| Number |
1-2
|
| Pagination |
127-141
|
| Publisher |
Taylor and Francis Inc.
|
| ISSN Number |
10584587
|
| Keywords | |
| Research Areas | |
| Download citation |