@article{33769,
  keywords = {thin films, lattice constants, excimer lasers, lanthanum compounds, X ray scattering, Epitaxial ferroelectric films, Lead zirconate titanate, Semiconducting lead compounds, Strain, Pulsed laser applications, Mapping, Depth analysis, Film structure, Grazing incidence X ray scattering},
  author = {M Petit and V Nagarajan and S Aggarwal and Ramamoorthy Ramesh and L.J Martínez-Miranda},
  title = {Analysis of thin PZT films as a function of depth and thickness by GIXS},
  abstract = {We have performed depth profile studies on PZT films of different thickness. Thin epitaxial films of PbZr0.2Ti0.8O3 have been deposited on mono-crystalline (001) LaAlO3 substrate by pulsed laser deposition. Grazing incidence X-ray scattering was used to study the films' structure. GIXS technique was used to analyze the in-plane compression of lattice parameters as a function of depth within the films. © 2000 OPA (Overseas Publishers Association) N.V. Published by license under the Gordon and Breach Science Publishers imprint.},
  year = {2000},
  journal = {Integrated Ferroelectrics},
  volume = {29},
  number = {1-2},
  pages = {127-141},
  publisher = {Taylor and Francis Inc.},
  issn = {10584587},
  doi = {10.1080/10584580008216680},
  note = {cited By 2},
  language = {eng},
}