%0 Journal Article
%K Thin films
%K Lattice constants
%K Excimer lasers
%K Lanthanum compounds
%K X-ray scattering
%K Epitaxial ferroelectric films
%K Lead zirconate titanate (PZT)
%K Semiconducting lead compounds
%K Strain
%K Pulsed laser applications
%K Mapping
%K Depth analysis
%K Film structure
%K Grazing incident x-ray scattering (GIXS)
%A M Petit
%A V Nagarajan
%A S Aggarwal
%A Ramamoorthy Ramesh
%A L.J Martínez-Miranda
%B Integrated Ferroelectrics
%D 2000
%G eng
%I Taylor and Francis Inc.
%P 127-141
%R 10.1080/10584580008216680
%T Analysis of thin PZT films as a function of depth and thickness by GIXS
%V 29
%X We have performed depth profile studies on PZT films of different thickness. Thin epitaxial films of PbZr0.2Ti0.8O3 have been deposited on mono-crystalline (001) LaAlO3 substrate by pulsed laser deposition. Grazing incidence X-ray scattering was used to study the films' structure. GIXS technique was used to analyze the in-plane compression of lattice parameters as a function of depth within the films. © 2000 OPA (Overseas Publishers Association) N.V. Published by license under the Gordon and Breach Science Publishers imprint.